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CFRP components in SCHNEEBERGER positioning systems

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CFRP components in SCHNEEBERGER positioning systems
CFRP components in SCHNEEBERGER positioning systems

SCHNEEBERGER develops positioning systems for use in wafer production. Because of very demanding customer requirements, SCHNEEBERGER has developed a range of solutions with CFRP components. One example is the new double gantry system. Highlights include the axle arrangement and the use of composite materials. As a result, the positioning speed is doubled as compared to that of previous systems.

CFRP in use in highly-dynamic precision axes

The chip manufacturing occurs via a lithographic layer structure on a silicon wafer in the cleanroom.
In order to ensure quality, critical dimensions are regularly tested in the manufacturing process (wafer metrology).  These measurements test dimensions <20 nm.
In this process, the wafer is moved to below the measuring instrument by means of a positioning system. The development and production of this positioning system is the task of the Business Unit Systems.

Systems movie

Our customers' requirements:
Reliable and precise products.

Our solution:
tailored systems, from single axes with integral control units through to highly complex machines.

SCHNEEBERGER overview linear bearings and positioning systems

Article/Example of application

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Press releases

New positioning system doubles positioning speed for 450 mm
New positioning system doubles positioning speed for 450 mm Revolutionary double gantry from Schneeberger. Known for innovation, Swiss firm Schneeberger AG Lineartechnik is currently developing a new positioning system that will bear the name Double Gantry. Download now
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Advantages of CFRP components

  • 30% reduction of the moving mass
  • Specific rigidity of the components increased by a factor of 2.5
  • 40% higher 1. Natural frequency of the system
  • 30% less M&S (move & settle) time
  • Required component tolerances maintained (e.g., parallelism)
  • System specifications can be safely observed (e.g., drift)

Contact us:

SCHNEEBERGER Contact us:

Maurice Bastings

 


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