Semi-conductor industry

Semiconductor equipment performance is defined by positioning accuracy, thermal stability, vibration behavior, and long-term reliability.
SCHNEEBERGER delivers integrated linear motion, measuring, and structural solutions engineered to meet the most demanding requirements across wafer processing, inspection, metrology, and advanced packaging tools.

We help semiconductor OEMs simplify system architecture, reduce error stack-up, and achieve stable, repeatable performance over the full life of the machine.

Partner With SCHNEEBERGER
Talk to our semiconductor specialists to discuss your application requirements, integration strategy, or custom system needs.

Core Semiconductor Capabilities

Integrated Motion + Measurement
Combining guidance and position feedback directly into the mechanical axis reduces tolerance stack-up, improves thermal behavior, and simplifies machine design.
Vacuum and Cleanroom Ready
Solutions compatible with high vacuum environments and cleanroom operation for contamination-sensitive processes.
Thermal and Dynamic Stability
Mechanically and thermally stable designs engineered for consistent accuracy under changing process conditions.
System-Level Expertise
From individual components to complete multi-axis systems, engineered, assembled, and validated to OEM specifications.

Downloads / Product catalog

Branche_Halbleiter.pdf Automated assembly systems with high positional accuracies guarantee the vibration free running of SCHNEEBERGER MINIRAIL.Download now

The secret of linear technolgy From standard components to complete systems, SCHNEEBERGER offers a unique spectrum of products and services. And we do it all for our customers’ benefit.Download now

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Precision Positioning Systems & Multi-Axis Solutions

SCHNEEBERGER designs and delivers customer-specific precision positioning systems for semiconductor equipment, from single critical axes to fully integrated multi-axis subsystems.

Precision Guidance with Integrated Measurement

MINIRAIL with MINISAM – miniature guidance with absolute measurement, resolution 100 nm available Interfaces Ports: BiSS/SSI, ABZ, UVW, SPI, analog Sin/Cos
MINIRAIL with MINISCALE PLUS / MSQScale – miniature guidance with incremental measurement, resolution to 0.1 μm
MONORAIL AMS – linear guide with embedded magneto resistive encoder, analog or digital interface, up to 3m travel per rail, limitless travel with AMS Long

Long-Term Lubrication with LUBE-S

MINIRAIL -LUBE-S – Maintenance‑free operation up to 20’000 km under normal conditions and specified load. Carriage dimensions and performance remain unchanged
In general, SCHNEEBERGER offers a variety of tailored lubricants for applications such as:
- Food & MedTech industries
- High-speed or low-temperature applications
- Cleanroom environments
- Vacuum operation
- Short-stroke applications

Vacuum-Compatible Precision Motion

MINISLIDE – ultra-high rigidity micro frictionless tables (cage control available), vacuum compatible to 10^-9 mbar
FORMULA-S – high-speed linear bearings (cage control available), vacuum compatible to 10^-7 mbar

Precision Drives for Semiconductor Positioning

Precision ground ball screws, diameters from 3 mm to 160 mm
Preloaded for zero axial play, multiple accuracy classes
Stainless steel options for cleanroom environments

Vibration-Damped Structural Solutions

Excellent vibration damping for inspection and metrology tools
High thermal stability and low drift behavior
Chemically resistant and cleanroom compatible
Precision mounting of guides, motors, and ball screws

Application examples

Wafer inspection and metrology systems

Lithography and mask handling subsystems

Backend assembly and advanced packaging equipment

Precision pick-and-place and alignment stages

Vacuum and cleanroom motion axes

Long-travel positioning systems requiring sub-micron accuracy

Product options

Configurable Options Tailored for Your Application

KCN/KCS guideways with maximum rigidity and precision

SCHNEEBERGER is known for its highest level of precision and develops and distributes products that are perfectly suited for this industrial segment. These are flexible in design, especially in situations where high load capacities and precise positioning are required in the tightest of spaces.

Discover KCN/KCS guide rails in detail

Measuring System

The absolute measuring systems SAM and the incremental measuring system Scale combine “guiding” and “measuring” in a highly integrated design.

Optimized for cleanroom applications

Optimized products for demanding applications with lubrication for cleanroom and FDA use, special cleaning and packaging processes, corrosion-resistant materials, and full product traceability.