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Customized solutions

No matter the industry, we turn demanding motion requirements into optimized, customer‑specific solutions with the right balance of performance and cost.

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Example of a real vacuum stage for the semiconductor industry
Example of a real vacuum stage for the semiconductor industry

The following table summarizes typical performance characteristics of our customized precision motion systems. Depending on the specific application, these systems can be engineered to meet demanding requirements in terms of size, accuracy, dynamic behavior, and environmental compatibility—key factors for high‑performance, cleanroom, and vacuum applications.

Key Performance Characteristics (typical ranges)

Parameter

Typical Performance Capability

DimensionsFrom a few millimeters up to several meters
Positioning Accuracy< 0,5µm over 500mm travel
Repeatability< 50nm using application-specific mapping
Move & Settle TimeTens of milliseconds for move of tens of millimeters, including settling in < 10nm
JitterDown to picometer level
CleanlinessCompatible with ISO Class 1 cleanroom environments
Vacuum CompatibilityDown to 10-7 mbar
Magnetic DisturbanceNon-repeatable disturbances ≤ 1 µT

 - Actual performance depends on system configuration and application requirements.

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Downloads / Product catalog

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Systems Brochure
Systems Brochure Engineered-to-Order Motion SolutionsDownload now
Systems - Flyer
Systems - Flyer Precision positioning systems and motion systemsDownload now

Application examples

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