Vacuum solutions

Vacuum positioning systems

Many thanks for your interest in SCHNEEBERGER products. It will be a pleasure to contact you in order to discuss more about your needs and our proposed solutions. Please send us your request and we will get back to you.

EUV, outgassing, pump-time, stability & magnetic disturbances are the mains parameters that are considered during the layout of a vacuum system. This in addition to all other key parameters that are relevant for a perfect motion solution for your demanding environment and performances.

Our systems are specifically developed to be able to run at partial pressures down to 10^9mbar by integrating specific components from linear motors (including specific shielding) to piezzo driven units & special cables.

All relevant machined parts (aluminium and/or SUS) are produced internally in order to keep the level of cleanness and outgassing controlled perfectly.

All vacuum systems are assembled, tested and packaged in our cleanroom, especially layed out to fill-full your production rhythme.

Typical specifications for "Vacuum" at POI*

  • Configuration: XYZ or + Z (gantry)
  • Travel: up to 3500 x 2700mm
  • Accuracy: ≤ 10 µm (over TIR, mapped)
  • Repeatability: ≤ 2 µm
  • Stability: ≤ 10 nm (within 1s ptp)
  • Move & Settle: < 500ms for 300mm
  • Cst velocity: < 0.01% at <100mm/s
  • Straightness: < 20um over 3000mm
  • Flatness: < 20um over 3000mm

*Point Of Interest

Systems movie

Our customers' requirements:
Reliable and precise products.

Our solution:
tailored systems, from single axes with integral control units through to highly complex machines.

SCHNEEBERGER overview linear bearings and positioning systems

Article/Example of application

Press releases

Contact us:

Adrian Raible

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Roggwil (Switzerland):

Head office of the company SCHNEEBERGER

business unit headquarters


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