Vacuum solutions

Vacuum solutions

EUV, outgassing, pump-time, stability & magnetic disturbances are the mains parameters that are considered during the layout of a vacuum system. This in addition to all other key parameters that are relevant for a perfect motion solution for your demanding environment and performances.

Our systems are specifically developed to be able to run at partial pressures down to 10^9mbar by integrating specific components from linear motors (including specific shielding) to piezzo driven units & special cables.

All relevant machined parts (aluminium and/or SUS) are produced internally in order to keep the level of cleanness and outgassing controlled perfectly.

All vacuum systems are assembled, tested and packaged in our cleanroom, especially layed out to fill-full your production rhythme.

Typical specifications for "Vacuum" at POI*

• Configuration: XYZ or + Z (gantry)
• Travel: up to 400 x 500 mm
• Accuracy: ≤ 10 µm (over TIR, mapped)
• Repeatability: ≤ 0,1 µm
• Stability: ≤ 2 nm (within 1s ptp)
• Move & Settle: < 120 ms for 25 mm
• Cst velocity: < 0.01% at <100mm/s
• Straightness: < 5 µm over 300 mm
• Flatness: < 20 µm over 300 mm

*Point Of Interest