Motion Solutions for Vacuum and UHV Applications

Our portfolio spans both precision components and fully integrated engineered‑to‑order motion systems, designed to operate reliably under stringent vacuum conditions.

In semiconductor manufacturing, SCHNEEBERGER solutions support critical processes such as electron‑beam (e‑beam) inspection, lithography, and metrology, where extreme positioning accuracy, long‑term stability, low outgassing, and minimal magnetic disturbance are essential. Leveraging deep application know‑how, we engineer motion systems that meet tight requirements for vacuum compatibility, cleanliness, thermal stability, and nanometer‑level performance.

The same expertise is applied to advanced applications in life and material sciences, including analytical instrumentation and research environments, where precision motion in vacuum is key to reproducible and reliable results. Through careful material selection, optimized system architecture, and integrated mechatronics and control, SCHNEEBERGER delivers robust, application‑specific vacuum solutions—from individual axes to fully integrated systems—ensuring predictable performance and long‑term reliability.