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SCHNEEBERGER Linear bearings and miniature guideways in the Semi-conductor industry

Customer requirements

There is an ongoing tendency in minimizing in the semiconductor and electronic industry. Consequences are very demanding highly accurate positioning axis in the sub-micron range for the supplier of such complete production and metrology systems. In the same time, because of competitions, cost factors became more and more important. One of our customers is a leading supplier of laser metrology systems in the semiconductor industry.

SCHNEEBERGER solution

Standard linear bearing has been replaced by SCHNEEBERGER high quality MINIRAIL.

Customer advantages

There is not anymore an individual preloading process of all the axis and therefore a stable preload value and stable accuracy. At the same time the assembly time and costs of the stages could have been reduced. 

Article/Example of application

Fully integrated and automated wafer alignment and bonding System for substrates of up to 8 inche.

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