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SCHNEEBERGER develops positioning systems for use in wafer production. Because of very demanding customer requirements, SCHNEEBERGER has developed a range of solutions with CFRP components. One example is the new double gantry system. Highlights include the axle arrangement and the use of composite materials. As a result, the positioning speed is doubled as compared to that of previous systems.
The chip manufacturing occurs via a lithographic layer structure on a silicon wafer in the cleanroom.
In order to ensure quality, critical dimensions are regularly tested in the manufacturing process (wafer metrology). These measurements test dimensions <20 nm.
In this process, the wafer is moved to below the measuring instrument by means of a positioning system. The development and production of this positioning system is the task of the Business Unit Systems.
Our customers' requirements:
Reliable and precise products.
tailored systems, from single axes with integral control units through to highly complex machines.