CFRP components in SCHNEEBERGER positioning systems

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CFRP components in SCHNEEBERGER positioning systems

SCHNEEBERGER develops positioning systems for use in wafer production. Because of very demanding customer requirements, SCHNEEBERGER has developed a range of solutions with CFRP components. One example is the new double gantry system. Highlights include the axle arrangement and the use of composite materials. As a result, the positioning speed is doubled as compared to that of previous systems.

CFRP in use in highly-dynamic precision axes

The chip manufacturing occurs via a lithographic layer structure on a silicon wafer in the cleanroom.
In order to ensure quality, critical dimensions are regularly tested in the manufacturing process (wafer metrology).  These measurements test dimensions <20 nm.
In this process, the wafer is moved to below the measuring instrument by means of a positioning system. The development and production of this positioning system is the task of the Business Unit Systems.

Systems movie

Our customers' requirements:
Reliable and precise products.

Our solution:
tailored systems, from single axes with integral control units through to highly complex machines.

SCHNEEBERGER overview linear bearings and positioning systems

Article/Example of application

Press releases

Advantages of CFRP components

  • 30% reduction of the moving mass
  • Specific rigidity of the components increased by a factor of 2.5
  • 40% higher 1. Natural frequency of the system
  • 30% less M&S (move & settle) time
  • Required component tolerances maintained (e.g., parallelism)
  • System specifications can be safely observed (e.g., drift)

Contact us:

Adrian Raible


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